(??/??)???????????

.

(1)Wafer level(TDDB/HCI/NBTI/EM/SM)
(2)//
(3)
(4)
(5)()
(6)(MRB)/(PCRB)
(7)
(8)

4

No
No

No

1.Wafer level,TSVInterposerHybrid bond
2.
3.
4.